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Characterization of a self-calibrating, high-precision, stacked-stage, vertical dual-axis goniometer
Mendenhall, Marcus H, Henins, Albert, Windover, Donald, Cline, James PVolume:
53
Language:
english
Journal:
Metrologia
DOI:
10.1088/0026-1394/53/3/933
Date:
June, 2016
File:
PDF, 2.31 MB
english, 2016