Methods for precisely controlling the residual stress and temperature coefficient of the frequency of a MEMS resonator based on an AlN cavity silicon-on-insulator platform
Wang, Nan, Xu, Jinghui, Zhang, Xiaolin, Wu, Guoqiang, Zhu, Yao, Li, Wei, Gu, YuandongVolume:
26
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/7/074003
Date:
July, 2016
File:
PDF, 1.07 MB
english, 2016