![](/img/cover-not-exists.png)
Influence of the hydrogen content in a-Si:H layers on the structural properties of poly-Si films obtained by AIC of glass/Al/a-Si:H structures
D-Malinovska, D, Angelov, O, S-Vassileva, M, Nichev, H, Pivin, J CVolume:
113
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/113/1/012020
Date:
May, 2008
File:
PDF, 608 KB
english, 2008