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Electrical parameters of thin nanoscale SiO x layers grown on plasma hydrogenated silicon
Alexandrova, S, Szekeres, A, Halova, E, Kojuharova, NVolume:
558
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/558/1/012054
Date:
December, 2014
File:
PDF, 809 KB
english, 2014