The vacuum system for technological unit development and design
Zhukeshov, A M, Gabdullina, A T, Amrenova, A U, Giniyatova, Sh G, Kaibar, A, Sundetov, A, Fermakhan, KVolume:
652
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/652/1/012062
Date:
November, 2015
File:
PDF, 746 KB
english, 2015