Surface passivation of GaAs using atomic layer deposition...

Materials Research Express 2015 / 09 Vol. 2; Iss. 9

Surface passivation of GaAs using atomic layer deposition grown MgO

Gao, Xian, Fang, Dan, Fang, Xuan, Tang, Jilong, Fang, Fang, Li, Jinhua, Chu, Xueying, Wang, Xiaohua, Wang, Xiaolei, Wei, Zhipeng
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Volume:
2
Language:
english
Journal:
Materials Research Express
DOI:
10.1088/2053-1591/2/9/095902
Date:
September, 2015
File:
PDF, 994 KB
english, 2015
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