Recrystallization behaviour and electrical properties of germanium ion implanted polycrystalline silicon films
Myeon-Koo Kang, Takayuki Matsui, Hiroshi KuwanoVolume:
7
Language:
english
Pages:
4
DOI:
10.1007/bf00180785
Date:
December, 1996
File:
PDF, 574 KB
english, 1996