[IEEE 2016 China Semiconductor Technology International...

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[IEEE 2016 China Semiconductor Technology International Conference (CSTIC) - Shanghai, China (2016.3.13-2016.3.14)] 2016 China Semiconductor Technology International Conference (CSTIC) - The improvement of the 2nd dummy poly gate removal with the optimized WAC condition

Ji, Shi-liang, Han, Qiu-hua, Zhang, Hai-Yang
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Year:
2016
Language:
english
DOI:
10.1109/cstic.2016.7464009
File:
PDF, 503 KB
english, 2016
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