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SPIE Proceedings [SPIE Micro92 - San Jose, CA (Monday 9 March 1992)] Optical/Laser Microlithography V - New design of silicon organic materials and processes for microelectronics (Invited Paper)
Averichkin, P. A., Maslakov, A. I., Valiev, Kamil A., Velikov, Leonid V., Cuthbert, John D.Volume:
1674
Year:
1992
Language:
english
DOI:
10.1117/12.130374
File:
PDF, 3.25 MB
english, 1992