SPIE Proceedings [SPIE Fibers '92 - Boston, MA (Tuesday 8 September 1992)] Integrated Optics and Microstructures - Micromachined 50-um x 250-um silicon torsional mirror arrays for optical signal processing
Hsiang, Pin-Ju, Garcia-Valenzuela, Augusto, Neifeld, Mark A., Tabib-Azar, Massood, Tabib-Azar, Massood, Polla, Dennis L.Volume:
1793
Year:
1993
Language:
english
DOI:
10.1117/12.141216
File:
PDF, 461 KB
english, 1993