SPIE Proceedings [SPIE Photomask Technology - Sunnyville, CA (Wednesday 23 September 1992)] 12th Annual BACUS Symposium on Photomask Technology and Management - Coherence probe metrology for phase-shift masks: initial results
Neil, Mark A., Monteverde, Robert J., Kirkish, Stephen D., Landstrom, Scott, LaFrance, RichardVolume:
1809
Year:
1993
Language:
english
DOI:
10.1117/12.142131
File:
PDF, 381 KB
english, 1993