SPIE Proceedings [SPIE Microelectronic Processing '92 - San...

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SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Submicrometer Metallization: Challenges, Opportunities, and Limitations - Thermally induced stresses and electromigration failure

Kisselgof, Larisa, Baranowski, S. P., Broomfield, Mike C., Spooner, T., Elliott, L., Brooke, L., Lloyd, James R., Kwok, Thomas, Kikkawa, Takamaro, Shenai, Krishna
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Volume:
1805
Year:
1993
Language:
english
DOI:
10.1117/12.145478
File:
PDF, 612 KB
english, 1993
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