SPIE Proceedings [SPIE SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation - San Diego, CA (Sunday 11 July 1993)] Multilayer and Grazing Incidence X-Ray/EUV Optics II - Determination of interfacial roughness correlation in W/C multilayer films: comparison using soft and hard x-ray diffraction

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