SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Microelectronic Processes, Sensors, and Controls - Application of a cluster tool for control of bipolar polysilicon emitter transistor characteristics
Reuss, Robert H., Werkhoven, Chris J., Bondur, James A., Elliott, Kiefer, Hauser, John R., Kwong, Dim-Lee, Ray, Asit K.Volume:
2091
Year:
1994
Language:
english
DOI:
10.1117/12.167330
File:
PDF, 642 KB
english, 1994