SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Microelectronic Processes, Sensors, and Controls - Characterization of rapid thermally grown dielectrics by surface charge analysis and atomic force microscopy
Grant, John M., Allen, Lynn R., Bondur, James A., Elliott, Kiefer, Hauser, John R., Kwong, Dim-Lee, Ray, Asit K.Volume:
2091
Year:
1994
Language:
english
DOI:
10.1117/12.167363
File:
PDF, 456 KB
english, 1994