SPIE Proceedings [SPIE SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation - San Diego, CA (Sunday 11 July 1993)] Applications of Laser Plasma Radiation - Mass-limited laser-plasma cryogenic target for 13-nm point x-ray sources for lithography
Jin, Feng, Gabel, Kai, Richardson, Martin C., Kado, Masataka, Vasil'ev, Andrew F., Salzmann, Daniel, Richardson, Martin C.Volume:
2015
Year:
1994
Language:
english
DOI:
10.1117/12.167993
File:
PDF, 552 KB
english, 1994