SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Microelectronics Technology and Process Integration - Analytic models and parametric investigations of IBE and RIE mechanisms for GaAs compounds
Ketata, K., Koumetz, Serge, Ketata, Mohamed, Debrie, Roland, Chen, Fusen E., Murarka, Shyam P.Volume:
2335
Year:
1994
Language:
english
DOI:
10.1117/12.186057
File:
PDF, 351 KB
english, 1994