SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Microelectronics Manufacturability, Yield, and Reliability - Surface cleaning effects on reliability for devices with ultrathin oxides or oxynitrides
Lai, Kafai, Hao, Ming-Yin, Chen, Wei-Ming, Lee, Jack C., Vasquez, Barbara, Kawasaki, HisaoVolume:
2334
Year:
1994
Language:
english
DOI:
10.1117/12.186742
File:
PDF, 376 KB
english, 1994