SPIE Proceedings [SPIE 14th Annual BACUS Symposium on Photomask Technology and Management - Santa Clara, CA (Wednesday 14 September 1994)] 14th Annual BACUS Symposium on Photomask Technology and Management - Optical proximity correction: a first look at manufacturability
Liebmann, Lars W., Grenon, Brian J., Lavin, Mark A., Schomody, Stephen, Zell, Thomas, Brodsky, William L., Shelden, Gilbert V.Volume:
2322
Year:
1994
Language:
english
DOI:
10.1117/12.195818
File:
PDF, 635 KB
english, 1994