SPIE Proceedings [SPIE 14th Annual BACUS Symposium on Photomask Technology and Management - Santa Clara, CA (Wednesday 14 September 1994)] 14th Annual BACUS Symposium on Photomask Technology and Management - Focused ion beam (FIB) repair of embedded shifter masks
Morgan, John C., Ferranti, David C., Pennelli, Chris, Saxonis, A., Joyce, William C., Brodsky, William L., Shelden, Gilbert V.Volume:
2322
Year:
1994
Language:
english
DOI:
10.1117/12.195833
File:
PDF, 489 KB
english, 1994