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SPIE Proceedings [SPIE SPIE Microtechnologies - Grenoble, France (Wednesday 24 April 2013)] Smart Sensors, Actuators, and MEMS VI - A large deflection model of silicon membranes for testing intrinsic stress of MEMS microphones by measuring pull-In voltage
Oesterle, Florian, Fink, Franz, Kuhn, Harald, Dehé, Alfons, Weigel, Robert, Koelpin, Alexander, Schmid, Ulrich, Sánchez de Rojas Aldavero, José Luis, Leester-Schaedel, MonikaVolume:
8763
Year:
2013
Language:
english
DOI:
10.1117/12.2016835
File:
PDF, 324 KB
english, 2013