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SPIE Proceedings [SPIE The Hague '90, 12-16 April - The Hague, Netherlands (Thursday 1 March 1990)] Industrial Inspection II - Laser computer-aided phase microscope with 10-nm resolution
Tychinsky, Vladimir P., Tavrov, Alexander V., Braggins, Donald W.Volume:
1265
Year:
1990
Language:
english
DOI:
10.1117/12.20231
File:
PDF, 331 KB
english, 1990