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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 25 August 2013)] X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X - Corrosion-resistant Mg/SiC multilayer coatings for EUV laser sources in the 25-80nm wavelength region
Soufli, Regina, Fernández-Perea, Mónica, Robinson, Jeff C., Baker, Sherry L., Alameda, Jennifer, Walton, Christopher C., Rodríguez-De Marcos, Luis, Méndez, Jose A., Larruquert, Juan I., Vidal-Dasilva,Volume:
8849
Year:
2013
Language:
english
DOI:
10.1117/12.2024955
File:
PDF, 915 KB
english, 2013