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SPIE Proceedings [SPIE Photonics West '95 - San Jose, CA (Wednesday 1 February 1995)] Laser-Induced Thin Film Processing - Realization of Si1-x-yGexCy/Si heterostructures by pulsed-laser-induced epitaxy of C+ implanted pseudomorphic SiGe films and of a-SiGeC:H films deposited on Si(100)
Boulmer, Jacques, Desmur-Larre, A., Guedj, C., Debarre, D., Boucaud, Philippe, Julien, Francois H., Finkman, Elieser, Nugent, Keith A., Laval, R., Ozenne, J.-B., Yang, H., Bouchier, D., Godet, ChristiVolume:
2403
Year:
1995
Language:
english
DOI:
10.1117/12.206273
File:
PDF, 1.17 MB
english, 1995