SPIE Proceedings [SPIE Photonics West '95 - San Jose, CA (Wednesday 1 February 1995)] Laser-Induced Thin Film Processing - Realization of Si1-x-yGexCy/Si heterostructures by pulsed-laser-induced epitaxy of C+ implanted pseudomorphic SiGe films and of a-SiGeC:H films deposited on Si(100)

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