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SPIE Proceedings [SPIE Smart Structures & Materials '95 - San Diego, CA (Sunday 26 February 1995)] Smart Structures and Materials 1995: Passive Damping - Passive damping to enhance active positioning of a prototype lithography platen
Segalman, Daniel J., Kipp, Robert J., Gregory, Danny L., Johnson, Conor D.Volume:
2445
Year:
1995
Language:
english
DOI:
10.1117/12.208904
File:
PDF, 446 KB
english, 1995