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SPIE Proceedings [SPIE Photonics West '95 - San Jose, CA, United States (Wednesday 1 February 1995)] Micro-Optics/Micromechanics and Laser Scanning and Shaping - Microfocusing optical device using piezoelectric thin-film actuator
Goto, Hiroshi, Wakabayashi, Shyuichi, Ikeda, Masaaki, Sakata, Minoru, Imanaka, Koichi, Takeuchi, Masashi, Yada, TsunejiVolume:
2383
Year:
1995
Language:
english
DOI:
10.1117/12.209015
File:
PDF, 363 KB
english, 1995