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SPIE Proceedings [SPIE SPIE's 1995 Symposium on Microlithography - Santa Clara, CA (Sunday 19 February 1995)] Optical/Laser Microlithography VIII - Effects of wafer topography on the formation of polysilicon gates
Socha, Robert J., Wong, Alfred K. K., Cagan, Myron R., Krivokapic, Zoran, Neureuther, Andrew R., Brunner, Timothy A.Volume:
2440
Year:
1995
Language:
english
DOI:
10.1117/12.209268
File:
PDF, 612 KB
english, 1995