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SPIE Proceedings [SPIE Smart Structures & Materials '95 - San Diego, CA (Sunday 26 February 1995)] Smart Structures and Materials 1995: Smart Materials - Deformation of large micro-electromechanical systems (MEMS) due to thermal and intrinsic stresses
Saif, Mohammed T., MacDonald, Noel C., Jardine, A. PeterVolume:
2441
Year:
1995
Language:
english
DOI:
10.1117/12.209803
File:
PDF, 422 KB
english, 1995