SPIE Proceedings [SPIE 1st Intl School on Laser Surface Microprocessing - Tashkent, Russian Federation (Monday 30 October 1989)] 1st Intl School on Laser Surface Microprocessing - UV laser photolysis of Mo(CO)6 and molybdenum film deposition
Bagratashvili, Victor N., Evseev, Alexander V., Kamayev, Sergey V., Markov, Michael A., Boyd, Ian W., Konov, Vitali I., Luk'yanchuk, Boris S.Volume:
1352
Year:
1990
Language:
english
DOI:
10.1117/12.23703
File:
PDF, 705 KB
english, 1990