SPIE Proceedings [SPIE SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation - Denver, CO (Sunday 4 August 1996)] Charged-Particle Optics II - Optical properties of immersion objective lenses and collimation of secondary electrons in low-voltage SEM
Tsuno, Katsushige, Handa, Nobuo, Matsumoto, Sunao, Mogami, A., Munro, EricVolume:
2858
Year:
1996
Language:
english
DOI:
10.1117/12.255512
File:
PDF, 1.31 MB
english, 1996