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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachining and Microfabrication Process Technology III - SAMPLE (Sandia agile MEMS prototyping, layout tools, and education)
Craig Barron, Carole, Davies, Brady R., Sniegowski, Jeffry J., Rodgers, M. Steven, Comtois, John H., Michalicek, M. Adrian, Chang, Shih-Chia, Pang, Stella W.Volume:
3223
Year:
1997
DOI:
10.1117/12.284476
File:
PDF, 1.83 MB
1997