SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Microlithography and Metrology in Micromachining III - One-step microlithography
Kahlen, Franz-Josef, Sankaranarayanan, Srikanth, Kar, Aravinda, Friedrich, Craig R., Umeda, AkiraVolume:
3225
Year:
1997
DOI:
10.1117/12.284548
File:
PDF, 581 KB
1997