SPIE Proceedings [SPIE Far East and Pacific Rim Symposium on Smart Materials, Structures, and MEMS - Adelaide, Australia (Wednesday 10 December 1997)] Smart Electronics and MEMS - New method to fabricate diffractive blazed gratings by anisotropic etching on (110) silicon wafers
Yang, Lung Jieh, Chang, Peizen, Lee, Chih-Kung, Teng, J.-T., Hariz, Alex, Varadan, Vijay K., Reinhold, OlafVolume:
3242
Year:
1997
Language:
english
DOI:
10.1117/12.293547
File:
PDF, 237 KB
english, 1997