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SPIE Proceedings [SPIE Third International Conference on Thin Film Physics and Applications - Shanghai, China (Tuesday 15 April 1997)] Third International Conference on Thin Film Physics and Applications - Surface treatment effects on Si(111) and (100) surface structures and Si/SiO2 interface state
Yamamoto, H., Okumura, K., Kanashima, Takeshi, Okuyama, Masanori, Zhou, Shixun, Wang, Yongling, Chen, Yi-Xin, Mao, ShuzhengVolume:
3175
Year:
1998
DOI:
10.1117/12.300658
File:
PDF, 975 KB
1998