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SPIE Proceedings [SPIE Smart Materials, Structures and MEMS - Bangalore, India (Wednesday 11 December 1996)] 1996 Symposium on Smart Materials, Structures, and MEMS - Optimization of stress in LPCVD polysilicon films for MEMS applications
Singh, Janak, Chand, Ami, Chandra, Sudhir, Aatre, Vasu K., Varadan, Vijay K., Varadan, Vasundara V.Volume:
3321
Year:
1998
Language:
english
DOI:
10.1117/12.305590
File:
PDF, 3.92 MB
english, 1998