SPIE Proceedings [SPIE International Conference on Optical...

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SPIE Proceedings [SPIE International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics - Kiev, Ukraine (Tuesday 13 May 1997)] Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997 - Use of Raman-scattering waves for the optical diagnostics of semiconductor materials for microelectronics

Semchuk, Olexander Y., Grechko, Leonid G., Ogenko, Vladimir M., Shenderovskii, Vasilii A., Semioshko, Vyacheslav M., Kobrgytskii, Vsevolod V., Svechnikov, Sergey V., Valakh, Mikhail Y.
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Volume:
3359
Year:
1998
Language:
english
DOI:
10.1117/12.306249
File:
PDF, 217 KB
english, 1998
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