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SPIE Proceedings [SPIE SPIE's International Symposium on Optical Science, Engineering, and Instrumentation - San Diego, CA (Sunday 19 July 1998)] Laser Interferometry IX: Techniques and Analysis - Direct group-delay measurement and 3D profilometry using a white-light interferometer
Liang, Yi, Wu, Q. M. Jonathan, Grover, Chander P., Kujawinska, Malgorzata, Brown, Gordon M., Takeda, MitsuoVolume:
3478
Year:
1998
Language:
english
DOI:
10.1117/12.312974
File:
PDF, 582 KB
english, 1998