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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Materials and Device Characterization in Micromachining - Modern VUV and x-ray micro-optics: LIGA-fabricated and micromachined devices
Kupka, Roland K., Roulliay, Marc, Bouamrane, Faycal, Megtert, Stephan, Friedrich, Craig R., Vladimirsky, YuliVolume:
3512
Year:
1998
Language:
english
DOI:
10.1117/12.324084
File:
PDF, 2.84 MB
english, 1998