SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV - Monitoring of a RTA process using multi-PCA
Miller, Michael L., Wang, Qingsu, Riley, Terrence, Toprac, Anthony J., Dang, KimVolume:
3507
Year:
1998
Language:
english
DOI:
10.1117/12.324365
File:
PDF, 279 KB
english, 1998