SPIE Proceedings [SPIE Microelectronic Manufacturing -...

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SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] Microelectronic Manufacturing Yield, Reliability, and Failure Analysis IV - Probe microloading effect of in-situ etch in EPROM stack-gate process

Chiou, Jang Ming, Pan, Sheng Liang, Ching, Kai Ming, Chang, Bi-Jiang, Lu, Kuo-Liang, Prasad, Sharad, Hartmann, Hans-Dieter, Tsujide, Tohru
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Volume:
3510
Year:
1998
Language:
english
DOI:
10.1117/12.324386
File:
PDF, 2.29 MB
english, 1998
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