SPIE Proceedings [SPIE 18th Annual BACUS Symposium on Photomask Technology and Management - Redwood City, CA (Wednesday 16 September 1998)] 18th Annual BACUS Symposium on Photomask Technology and Management - Phase controllability improvement for alternating phase shift mask
Nara, Masami, Yokoyama, Toshifumi, Fujita, Hiroshi, Miyashita, Hiroyuki, Hayashi, Naoya, Grenon, Brian J., Abboud, Frank E.Volume:
3546
Year:
1998
Language:
english
DOI:
10.1117/12.332833
File:
PDF, 671 KB
english, 1998