SPIE Proceedings [SPIE Photonics East (ISAM, VVDC, IEMB) -...

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SPIE Proceedings [SPIE Photonics East (ISAM, VVDC, IEMB) - Boston, MA (Sunday 1 November 1998)] Three-Dimensional Imaging, Optical Metrology, and Inspection IV - Coherence scanning in a geometrically desensitized interferometer

Deck, Leslie L., de Groot, Peter J., Colonna de Lega, Xavier, Harding, Kevin G., Svetkoff, Donald J., Creath, Katherine, Harris, James S.
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Volume:
3520
Year:
1998
Language:
english
DOI:
10.1117/12.334345
File:
PDF, 352 KB
english, 1998
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