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SPIE Proceedings [SPIE Optoelectronics '99 - Integrated Optoelectronic Devices - San Jose, CA (Saturday 23 January 1999)] Surface Characterization for Computer Disks, Wafers, and Flat Panel Displays - Polarization of light scattered by particles on silicon wafers
Sung, Lipiin, Mulholland, George W., Germer, Thomas A., Stover, John C.Volume:
3619
Year:
1999
Language:
english
DOI:
10.1117/12.343715
File:
PDF, 430 KB
english, 1999