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SPIE Proceedings [SPIE Photonics China '98 - Beijing, China (Wednesday 16 September 1998)] High-Power Lasers: Solid State, Gas, Excimer, and Other Advanced Lasers II - Measurement of spatial coherence of KrF excimer laser
Liu, Jiansheng, Liu, Jingru, Wei, Yanming, Mei, Sui-Sheng, Truesdell, Keith A.Volume:
3549
Year:
1998
Language:
english
DOI:
10.1117/12.344118
File:
PDF, 659 KB
english, 1998