SPIE Proceedings [SPIE International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering - St. Petersburg, Russia (Monday 8 June 1998)] International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering - Theoretical and experimental studies of (AlN)1-x(SIC)x layer structures formed by N+ and Al+ coimplantation in 6H-SiC
Kulikov, Dmitri V., Pezoldt, Joerg, Rybin, Peter V., Skorupa, Wolfgang, Trushin, Yuri V., Yankov, Rossen A., Melker, Alexander I.Volume:
3687
Year:
1999
Language:
english
DOI:
10.1117/12.347431
File:
PDF, 196 KB
english, 1999