SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Emerging Lithographic Technologies III - Sub-100-nm imaging in x-ray lithography
Vladimirsky, Olga, Dandekar, Niru V., Jiang, Wenlong, Leonard, Quinn J., Simon, Klaus, Bollepalli, Srinivas B., Vladimirsky, Yuli, Taylor, James W., Vladimirsky, YuliVolume:
3676
Year:
1999
Language:
english
DOI:
10.1117/12.351161
File:
PDF, 3.31 MB
english, 1999