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SPIE Proceedings [SPIE Optoelectronics '99 - Integrated Optoelectronic Devices - San Jose, CA (Saturday 23 January 1999)] Laser Applications in Microelectronic and Optoelectronic Manufacturing IV - Advances in pulsed laser deposition growth of nitride thin films
Fernandez, Felix E., Pumarol, Manuel, Martinez, Antonio, Jia, Weiyi, Wang, Yanyung, Rodriguez, Edgardo, Mourad, Houssam A., Dubowski, Jan J., Helvajian, Henry, Kreutz, Ernst-Wolfgang, Sugioka, KojiVolume:
3618
Year:
1999
Language:
english
DOI:
10.1117/12.352706
File:
PDF, 2.30 MB
english, 1999