SPIE Proceedings [SPIE ICO XVIII 18th Congress of the International Commission for Optics - San Francisco, CA (Monday 2 August 1999)] 18th Congress of the International Commission for Optics - Straightness measurements using a reflection confocal optical system
Matsuda, Kiyofumi, Eiju, Tomoaki, Roy, Maitreyee, O'Byrne, John W., Fekete, Pal W., Sheppard, Colin J. R., Glass, Alexander J., Goodman, Joseph W., Chang, Milton, Guenther, Arthur H., Asakura, ToshimiVolume:
3749
Year:
1999
Language:
english
DOI:
10.1117/12.354902
File:
PDF, 99 KB
english, 1999