SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachined Devices and Components V - Advances in MEMS using SFB and DRIE technology
Van Drieenhuizen, Bert P., French, Patrick J., Peeters, EricVolume:
3876
Year:
1999
Language:
english
DOI:
10.1117/12.360510
File:
PDF, 2.97 MB
english, 1999