SPIE Proceedings [SPIE Symposium on Micromachining and...

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SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Micromachining and Microfabrication Process Technology V - Fabrication of pop-up detector arrays on Si wafers

Li, Mary J., Allen, Christine A., Gordon, Scott A., Kuhn, Jonathan L., Mott, David B., Stahle, Caroline K., Wang, Liqin L., Smith, James H., Karam, Jean Michel
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Volume:
3874
Year:
1999
Language:
english
DOI:
10.1117/12.361247
File:
PDF, 1.62 MB
english, 1999
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